EUVL
基本解釋
- 極紫外光刻
英漢例句
- The principle, technological process and equipments of EUVL are discussed and its production cost, application prospects, advantages and disadvantages are also comparably analyzed.
本文論述了EUVL技術(shù)的原理、加工工藝和設(shè)備,并對比分析了EUVL的生產(chǎn)成本、應用前景及其優(yōu)缺點。